acid, 2-methyl-,2,2,2-trifluoroethyl ester (TFEMA)
AKA: 2,2,2-Trifluoroethyl methacrylate
CAS # 352-87-4
2,2,2-Trifluoroethylmethacrylate is a useful monomer that can be incorporated intophotoresist polymers.
Properties
Molecular Weight | 168 |
Boiling Point | 52-54°C @ 25 inches Hg |
Density | 1.19 g/cm3 |
Appearance | Clear, colorless liquid |