HaloVac®精密真空泵油是专为精密真空泵应用中所需的低蒸汽压和粘度特性而设计的氟化润滑剂。 HaloVac® oilsare designed for use as nonflammable and nonreactive lubricants incontinuous operations that involve oxidizing environments, orhazardous chemicals. HaloVac® oils are routinely used inapplications ranging from plasma etching and chemical vapordeposition in semiconductor fabrication to the vacuums usedreactive gas handling and electron microscopy. These oilssignificantly reduce the safety and exposure risks associated withthe routine operation, maintenance, and waste disposal common inthese applications.
Key Performance Characteristics:
Chemically inert
Non-toxic
No sludge-formation
Nonflammable (no flash or fire point)
High thermal stability
Exceptional resistance to Lewis-Acids
Low vapor pressure